Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824277 | Optical beam guidance system and method for preventing contamination of optical components contained therein | Ansgar Freitag, Ulrich Bingel, Josef Distl | 2004-11-30 |
| 6781685 | Process and device for in-situ decontamination of a EUV lithography device | — | 2004-08-24 |
| 6559060 | Process for the structuring of a substrate | Markus Kasparek, Oliver Jacobs | 2003-05-06 |