Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559060 | Process for the structuring of a substrate | Uwe Hamm, Oliver Jacobs | 2003-05-06 |
| 6441975 | Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element | Michael J. Ebert, Franz Sorg, Michael Trunz, Frank Marianek, Karlfried Osterried | 2002-08-27 |