Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller +3 more | 2011-11-29 |
| 6441975 | Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element | Michael J. Ebert, Franz Sorg, Michael Trunz, Karlfried Osterried, Markus Kasparek | 2002-08-27 |