Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7274430 | Optical arrangement and projection exposure system for microlithography with passive thermal compensation | Christian Wagner, Ralf Hilgers | 2007-09-25 |
| 7227707 | Holding device for an optical element | Alexander Hinz | 2007-06-05 |
| 6969854 | Arrangement for holding a particle beam apparatus | Erik Essers | 2005-11-29 |
| 6834163 | Camera system having at least two first cameras and two second cameras | Johann Huell | 2004-12-21 |
| 6655037 | Coordinate measuring apparatus having a bending-resistant measuring table | Klaus-Dieter Götz, Heinz Broghammer | 2003-12-02 |
| 6441975 | Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element | Michael J. Ebert, Franz Sorg, Frank Marianek, Karlfried Osterried, Markus Kasparek | 2002-08-27 |
| 6392825 | Assembly comprising an optical element and a mount | Ralf Hilgers, Bernhard Gellrich | 2002-05-21 |
| 6369959 | Assembly comprising an optical element and a mount | Bernhard Gellrich, Roland Gischa, Hubert Holderer, Cornelia Rösch | 2002-04-09 |
| 6366413 | Method of straightening the supporting surfaces of supporting elements for optical elements | Bernhard Gellrich | 2002-04-02 |
| 6259571 | Adjustable assembly | Hubert Holderer, Peter Ruemmer, Bernhard Geuppert, Thomas Polzer, Johan Dries +2 more | 2001-07-10 |
| 6227754 | Composite body | Kerstin von Nessen-Lapp, Bernhard Trier | 2001-05-08 |
| 6229657 | Assembly of optical element and mount | Hubert Holderer, Peter Rummer | 2001-05-08 |
| 6191898 | Optical imaging device, particularly an objective, with at least one optical element | Ralf Hilgers, Erich Merz, Michael Mühlbeyer | 2001-02-20 |
| 6111691 | Positioning table | Bernhard Trier | 2000-08-29 |
| 6099193 | Composite body | Christof Hangleiter, Bernhard Trier | 2000-08-08 |