Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7274430 | Optical arrangement and projection exposure system for microlithography with passive thermal compensation | Christian Wagner, Michael Trunz | 2007-09-25 |
| 6392825 | Assembly comprising an optical element and a mount | Michael Trunz, Bernhard Gellrich | 2002-05-21 |
| 6191898 | Optical imaging device, particularly an objective, with at least one optical element | Michael Trunz, Erich Merz, Michael Mühlbeyer | 2001-02-20 |