Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8810934 | Positioning method for an optical arrangement of a projection illumination system | Karl-Eugen Aubele, Thorsten Rassel | 2014-08-19 |
| 8514371 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Raoul Reiner, Klaus Rief +10 more | 2013-08-20 |
| 7961294 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Raoul Reiner, Klaus Rief +10 more | 2011-06-14 |
| 7768721 | Optical assembly, projection exposure apparatus and projection objective | Jochen Weber, Ole Fluegge, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf | 2010-08-03 |
| 7710542 | Imaging device in a projection exposure machine | Wolfgang Hummel, Jurgen Fischer, Karl-Eugen Aubele, Raoul Reiner, Klaus Rief +10 more | 2010-05-04 |
| 7548387 | Optical imaging device | Thorsten Rassel, Martin Mahlmann | 2009-06-16 |
| 7486382 | Imaging device in a projection exposure machine | Stephan Back, Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Raoul Reiner +11 more | 2009-02-03 |
| 7304717 | Imaging device in a projection exposure facility | Wolfgang Hummel, Juergen Fischer, Karl-Eugen Aubele, Raoul Reiner, Klaus Rief +10 more | 2007-12-04 |
| 6388823 | Optical system, especially a projection light facility for microlithography | Erwin Gaber, Christian Wagner, Hubert Holderer, Michael Gerhard, Jochen Becker +1 more | 2002-05-14 |
| 6307688 | Optical system, in particular projection-illumination unit used in microlithography | Jochen Becker | 2001-10-23 |
| 6191898 | Optical imaging device, particularly an objective, with at least one optical element | Michael Trunz, Ralf Hilgers, Michael Mühlbeyer | 2001-02-20 |