KB

Kai-Uwe Berroth

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
📍 Heldenfingen, DE: #2 of 5 inventorsTop 40%
Overall (All Time): #3,297,844 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7768721 Optical assembly, projection exposure apparatus and projection objective Jochen Weber, Erich Merz, Ole Fluegge, Cornelia Buehler, Markus Hauf 2010-08-03