Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740562 | Sealing device, component and lithography apparatus | Dieter Bader, Alexander Ostendorf | 2023-08-29 |
| 8891172 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff +5 more | 2014-11-18 |
| 8508854 | Optical element and method | Eric Eva, Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff +5 more | 2013-08-13 |
| 8325322 | Optical correction device | Markus Hauf, Ulrich Schoenhoff, Payam Tayebati, Michael Thier, Tilmann Heil +7 more | 2012-12-04 |
| 7768721 | Optical assembly, projection exposure apparatus and projection objective | Jochen Weber, Erich Merz, Kai-Uwe Berroth, Cornelia Buehler, Markus Hauf | 2010-08-03 |