Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Erik Loopstra, Drew Chieda, Matthew Lipson, Victor Antonio PEREZ-FALCON +1 more | 2024-10-15 |
| 11987521 | Substrate for a reflective optical element | — | 2024-05-21 |
| 11874525 | Optical element and lithography system | — | 2024-01-16 |
| 11126087 | Component for a mirror array for EUV lithography | — | 2021-09-21 |
| 11099484 | Method for repairing reflective optical elements for EUV lithography | Robert Meier, Holger Kierey, Christof Jalics, Ralf Winter, Arno Schmittner +4 more | 2021-08-24 |
| 10976667 | Optical manipulator, projection lens and projection exposure apparatus | — | 2021-04-13 |
| 10649340 | Reflective optical element for EUV lithography | Dirk Heinrich Ehm, Vitaliy Shklover, Irene Ament, Stefan Schmidt, Moritz Becker +6 more | 2020-05-12 |
| 10427965 | Method for loading a blank composed of fused silica with hydrogen, lens element and projection lens | — | 2019-10-01 |
| 9036152 | Method and apparatus for determining the absorption in a blank | — | 2015-05-19 |
| 8891172 | Optical element and method | Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge +5 more | 2014-11-18 |
| 8780448 | Lens blank and lens elements as well as method for their production | — | 2014-07-15 |
| 8508854 | Optical element and method | Payam Tayebati, Michael Thier, Markus Hauf, Ulrich Schoenhoff, Ole Fluegge +5 more | 2013-08-13 |
| 8174771 | Lens blank and lens elements as well as method for their production | — | 2012-05-08 |
| 7934390 | Method for manufacturing a lens of synthetic quartz glass with increased H2 content | — | 2011-05-03 |
| 7907347 | Optical composite material and method for its production | Wilfried Clauss | 2011-03-15 |
| 7791811 | Lens blank and lens elements as well as method for their production | — | 2010-09-07 |
| 7352452 | Method and apparatus for setting optical imaging properties by means of radiation treatment | Ulrich Wegmann | 2008-04-01 |
| 7196842 | Attenuating filter for ultraviolet light | Bernhard Weigl, Hans-Jochen Paul | 2007-03-27 |
| 6996141 | Device for reducing the peak power of a pulsed laser light source | Karl-Heinz Schuster, Harry J. Bauer | 2006-02-07 |
| 6992753 | Projection optical system | Daniel Krähmer | 2006-01-31 |
| 6740159 | Method of making a fracture-resistant calcium fluoride single crystal and its use | Joerg Kandler, Ewald Moersen, Burkhard Speit, Harry J. Bauer, Thure Boehm +4 more | 2004-05-25 |