Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10474036 | Optical element and optical arrangement therewith | Boris Bittner, Norbert Wabra, Thomas Schicketanz | 2019-11-12 |
| 9915876 | EUV mirror and optical system comprising EUV mirror | Thomas Schicketanz, Christoph Zaczek | 2018-03-13 |
| 9915873 | Reflective optical element, and optical system of a microlithographic projection exposure apparatus | Hartmut Enkisch, Thomas Schicketanz, Oliver Dier, Joern WEBER, Christian Grasse +2 more | 2018-03-13 |
| 9494718 | Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective | Stephan Muellender, Joern WEBER, Wilfried Clauss, Gerhard Braun, Sascha Migura +4 more | 2016-11-15 |
| 9188771 | Reflective optical imaging system | Aurelian Dodoc, Christoph Zaczek, Sascha Migura, Gerhard Braun, Hans-Juergen Mann | 2015-11-17 |
| 8294991 | Interference systems for microlithgraphic projection exposure systems | Ralf Mueller, Toralf Gruner, Michael Totzeck, Heiko Feldmann | 2012-10-23 |
| 7196842 | Attenuating filter for ultraviolet light | Bernhard Weigl, Eric Eva | 2007-03-27 |
| 7093937 | Optical component and coating system for coating substrates for optical components | Harry J. Bauer, Matthias Heller, Jens Ullmann, Patrick Scheible, Christoph Zaczek | 2006-08-22 |
| 6967771 | Antireflection coating for ultraviolet light at large angles of incidence | Ralf Kuschnereit | 2005-11-22 |
| 6863398 | Method and coating system for coating substrates for optical components | Harry J. Bauer, Matthias Heller, Jens Ullmann, Patrick Scheible, Christoph Zaczek | 2005-03-08 |
| 6836379 | Catadioptric objective | Michael Gerhard | 2004-12-28 |
| 6825976 | Antireflection coating for ultraviolet light | Matthias Heller | 2004-11-30 |
| 6697194 | Antireflection coating for ultraviolet light at large angles of incidence | Ralf Kuschnereit | 2004-02-24 |