Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372884 | Device for positioning and holding at least one optical element, measurement system | Thomas Groezinger, Semih Oeztuerk, Anton F. Haase | 2025-07-29 |
| 12117731 | Method for producing a mirror of a microlithographic projection exposure apparatus | Christoph Zaczek, Eric Eva, Drew Chieda, Matthew Lipson, Victor Antonio PEREZ-FALCON +1 more | 2024-10-15 |
| 10908508 | Position measurement of optical elements in a lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel, Suzanne Cosijn | 2021-02-02 |
| 10599051 | Projection exposure apparatus, and method for reducing deformations, resulting from dynamic accelerations, of components of the projection exposure apparatus | Stefan Hembacher, Jens Kugler, Bernhard Geuppert | 2020-03-24 |
| 10509325 | Position measurement of optical elements in a lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel, Suzanne Cosijn | 2019-12-17 |
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann, Wilhelm Ulrich, David Shafer | 2019-11-19 |
| 6765712 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken | 2004-07-20 |
| 6226075 | Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices | Peter Heiland | 2001-05-01 |
| 5767948 | Lithographic device with a three-dimensionally positionable mask holder | Frank Bernhard Sperling, Hendricus J.M. Meijer, Jan Van Eijk | 1998-06-16 |