Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10908508 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel | 2021-02-02 |
| 10509325 | Position measurement of optical elements in a lithographic apparatus | Erik Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Sascha Bleidistel | 2019-12-17 |