Issued Patents All Time
Showing 1–25 of 133 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10969694 | Projection lens, projection exposure apparatus and projection exposure method | Alexander Epple | 2021-04-06 |
| 10481500 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann, Wilhelm Ulrich, Erik Loopstra | 2019-11-19 |
| 10371574 | Detector device for detection of a spectral portion for a microscope | Tiemo Anhut, Matthias Wald | 2019-08-06 |
| 10132685 | Detector device for detection of a spectral portion for a microscope | Tiemo Anhut, Matthias Wald | 2018-11-20 |
| 10073256 | Device for imaging sample | Wolfgang Singer, Ralf Wolleschensky, Wilhelm Ulrich, Artur Degen | 2018-09-11 |
| 9804378 | Arrangement for light sheet microscopy | Wolfgang Singer, Artur Degen, Jörg Siebenmorgen | 2017-10-31 |
| 9772478 | Catadioptric projection objective with parallel, offset optical axes | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2017-09-26 |
| 9684182 | Optical image offset device, optical image stabilization device and optical observation apparatus | Marco Pretorius | 2017-06-20 |
| 9535337 | Imaging optics, microlithography projection exposure apparatus having same and related methods | Hans-Juergen Mann | 2017-01-03 |
| 9500958 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann | 2016-11-22 |
| 9377414 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, Bin-Ming Benjamin Tsai, David L. Brown | 2016-06-28 |
| 9304407 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Wilhelm Ulrich | 2016-04-05 |
| 9052494 | Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths | Shiow-Hwei Hwang, Gregory L. Kirk, Hwan J. Jeong, Russel Hudyma | 2015-06-09 |
| 9013677 | Imaging optics, microlithography projection exposure apparatus having same and related methods | Hans-Juergen Mann | 2015-04-21 |
| 8908269 | Immersion catadioptric projection objective having two intermediate images | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2014-12-09 |
| 8804234 | Catadioptric projection objective including an aspherized plate | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple | 2014-08-12 |
| 8730572 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2014-05-20 |
| 8692986 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, Bin-Ming Benjamin Tsai, David L. Brown | 2014-04-08 |
| 8675276 | Catadioptric imaging system for broad band microscopy | Yung-Ho Alex Chuang, J. Joseph Armstrong | 2014-03-18 |
| 8632195 | Catoptric objectives and systems using catoptric objectives | Hans-Juergen Mann, Wilhelm Ulrich | 2014-01-21 |
| 8610877 | Imaging optical system and projection exposure installation for microlithography with an imaging optical system of this type | Hans-Juergen Mann | 2013-12-17 |
| 8553217 | EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers | Yung-Ho Alex Chuang, Richard W. Solarz, Bin-Ming Benjamin Tsai, David L. Brown | 2013-10-08 |
| 8416490 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2013-04-09 |
| 8363315 | Catadioptric projection objective with mirror group | Alexander Epple, Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Mann | 2013-01-29 |
| 8355201 | Catadioptric projection objective | Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann, Alexander Epple +2 more | 2013-01-15 |