Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429319 | Inspection system including parallel imaging paths with multiple and selectable spectral bands | Amir Bar, Grace Hsiu-Ling Chen, Daniel L. Cavan | 2019-10-01 |
| 9052494 | Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths | Gregory L. Kirk, Hwan J. Jeong, David Shafer, Russel Hudyma | 2015-06-09 |
| 8575576 | Optical imaging system with laser droplet plasma illuminator | Richard W. Solarz, Stephane Durant | 2013-11-05 |
| 8384887 | Methods and systems for inspection of a specimen using different inspection parameters | Steve R. Lange, Paul Frank Marella, Nat Ceglio, Tao-Yi Fu | 2013-02-26 |
| 8355140 | Systems configured to generate output corresponding to defects on a specimen | Tao-Yi Fu, Xiumei Liu | 2013-01-15 |
| 8178860 | Image collection | Gregory L. Kirk, Matthew Derstine, Isabella Talley Lewis | 2012-05-15 |
| 7924434 | Systems configured to generate output corresponding to defects on a specimen | Tao-Yi Fu, Xiumei Liu | 2011-04-12 |
| 7738089 | Methods and systems for inspection of a specimen using different inspection parameters | Steve R. Lange, Paul Frank Marella, Nat Ceglio, Tao-Yi Fu | 2010-06-15 |
| 7327464 | System and method for coherent optical inspection | Tao-Yi Fu | 2008-02-05 |
| 7259869 | System and method for performing bright field and dark field optical inspection | Nat Ceglio | 2007-08-21 |
| 7209239 | System and method for coherent optical inspection | Tao-Yi Fu | 2007-04-24 |
| 7095507 | Method and apparatus using microscopic and interferometric based detection | Nat Ceglio | 2006-08-22 |
| 7061625 | Method and apparatus using interferometric metrology for high aspect ratio inspection | Tao-Yi Fu | 2006-06-13 |