Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8384887 | Methods and systems for inspection of a specimen using different inspection parameters | Steve R. Lange, Paul Frank Marella, Shiow-Hwei Hwang, Tao-Yi Fu | 2013-02-26 |
| 7738089 | Methods and systems for inspection of a specimen using different inspection parameters | Steve R. Lange, Paul Frank Marella, Shiow-Hwei Hwang, Tao-Yi Fu | 2010-06-15 |
| 7259869 | System and method for performing bright field and dark field optical inspection | Shiow-Hwei Hwang | 2007-08-21 |
| 7095507 | Method and apparatus using microscopic and interferometric based detection | Shiow-Hwei Hwang | 2006-08-22 |