| 10429319 |
Inspection system including parallel imaging paths with multiple and selectable spectral bands |
Shiow-Hwei Hwang, Amir Bar, Grace Hsiu-Ling Chen |
2019-10-01 |
| 9703207 |
System and method for reducing dynamic range in images of patterned regions of semiconductor wafers |
Grace Hsiu-Ling Chen |
2017-07-11 |
| 9128064 |
Super resolution inspection system |
Grace Hsiu-Ling Chen, Qibiao Chen |
2015-09-08 |
| 8643835 |
Active planar autofocus |
Scott A. Young, Yale Zhang, Aviv Balan |
2014-02-04 |
| 7227984 |
Method and apparatus for identifying defects in a substrate surface by using dithering to reconstruct under-sampled images |
— |
2007-06-05 |
| 6316164 |
Proximity effect correction method through uniform removal of fraction of interior pixels |
N. William Parker, Alan D. Brodie, John H. McCoy |
2001-11-13 |
| RE33956 |
Inspection system for array of microcircuit dies having redundant circuit patterns |
Lawrence H. Lin, Robert B. Howe |
1992-06-09 |
| 4811409 |
Method and apparatus for detecting defect information in a holographic image pattern |
— |
1989-03-07 |
| 4806774 |
Inspection system for array of microcircuit dies having redundant circuit patterns |
Lawrence H. Lin, Robert B. Howe |
1989-02-21 |
| 4788431 |
Specimen distance measuring system |
William A. Eckes, Lee H. Veneklasen, Glen E. Howard, Donald J. McCarthy, Allen M. Carroll |
1988-11-29 |
| 4659172 |
Rotatable and translatable mounting mechanism for a specimen pattern in optical processing apparatus |
— |
1987-04-21 |