Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11637030 | Multi-stage, multi-zone substrate positioning systems | Yoram Uziel, Ulrich Pohlmann, Frank Laske, Nadav Gutman, Ariel Hildesheim | 2023-04-25 |
| 11209373 | Six degree of freedom workpiece stage | — | 2021-12-28 |
| 11121019 | Slotted electrostatic chuck | Haoran Jiang | 2021-09-14 |
| 10468288 | Methods and systems for chucking a warped wafer | Luping Huang, Savita Chandan, Chia-Chu Chen, Teck Meriam | 2019-11-05 |
| 10083852 | Floating wafer chuck | Vaibhaw Vishal | 2018-09-25 |
| 9529280 | Stage apparatus for semiconductor inspection and lithography systems | — | 2016-12-27 |
| 8924014 | Dual scanning stage | — | 2014-12-30 |
| 8643835 | Active planar autofocus | Scott A. Young, Daniel L. Cavan, Yale Zhang | 2014-02-04 |
| 8285418 | Dual scanning stage | — | 2012-10-09 |
| 7992877 | Non contact substrate chuck | — | 2011-08-09 |