Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055859 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more | 2024-08-06 |
| 11862524 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more | 2024-01-02 |
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Stefan Eyring, Mark Ghinovker, Yoel Feier, Eitan Hajaj +4 more | 2023-07-18 |
| 11637030 | Multi-stage, multi-zone substrate positioning systems | Yoram Uziel, Frank Laske, Nadav Gutman, Ariel Hildesheim, Aviv Balan | 2023-04-25 |
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Stefan Eyring, Inna Steely-Tarshish, Nadav Gutman | 2021-12-28 |
| 10473460 | Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals | Nadav Gutman, Eran Amit, Stefan Eyring, Hari Pathangi, Frank Laske +1 more | 2019-11-12 |
| 10474040 | Systems and methods for device-correlated overlay metrology | Frank Laske, Stefan Eyring, Nadav Gutman | 2019-11-12 |
| 9851643 | Apparatus and methods for reticle handling in an EUV reticle inspection tool | Francis Chilese, Detlef Wolter, Joseph F. Walsh | 2017-12-26 |
| 8125653 | Apparatus and method for the determination of the position of a disk-shaped object | Gert Weniger, Frank Rennicke | 2012-02-28 |