Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631602 | Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes | — | 2023-04-18 |
| 11600497 | Using absolute Z-height values for synergy between tools | Sandeep Madhogarhia, Rohit Bhat | 2023-03-07 |
| 11035666 | Inspection-guided critical site selection for critical dimension measurement | Jagdish Chandra Saraswatula, Arpit Yati | 2021-06-15 |
| 10672588 | Using deep learning based defect detection and classification schemes for pixel level image quantification | Sivaprrasath Meenakshisundaram, Tanay Bansal | 2020-06-02 |
| 10473460 | Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals | Nadav Gutman, Eran Amit, Stefan Eyring, Frank Laske, Ulrich Pohlmann +1 more | 2019-11-12 |