HP

Hari Pathangi

KL Kla-Tencor: 3 patents #442 of 1,394Top 35%
KL Kla: 2 patents #202 of 758Top 30%
Overall (All Time): #941,722 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11631602 Enabling scanning electron microscope imaging while preventing sample damage on sensitive layers used in semiconductor manufacturing processes 2023-04-18
11600497 Using absolute Z-height values for synergy between tools Sandeep Madhogarhia, Rohit Bhat 2023-03-07
11035666 Inspection-guided critical site selection for critical dimension measurement Jagdish Chandra Saraswatula, Arpit Yati 2021-06-15
10672588 Using deep learning based defect detection and classification schemes for pixel level image quantification Sivaprrasath Meenakshisundaram, Tanay Bansal 2020-06-02
10473460 Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals Nadav Gutman, Eran Amit, Stefan Eyring, Frank Laske, Ulrich Pohlmann +1 more 2019-11-12