Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12085385 | Design-assisted large field of view metrology | Frank Laske | 2024-09-10 |
| 12055859 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-08-06 |
| 11894214 | Detection and correction of system responses in real-time | Henning Stoschus, Christopher T. Sears | 2024-02-06 |
| 11862524 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-01-02 |
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Inna Steely-Tarshish, Mark Ghinovker, Yoel Feier, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-07-18 |
| 11508551 | Detection and correction of system responses in real-time | Henning Stoschus, Christopher T. Sears | 2022-11-22 |
| 11481922 | Online navigational drift correction for metrology measurements | — | 2022-10-25 |
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Ulrich Pohlmann, Inna Steely-Tarshish, Nadav Gutman | 2021-12-28 |
| 10473460 | Overlay measurements of overlapping target structures based on symmetry of scanning electron beam signals | Nadav Gutman, Eran Amit, Hari Pathangi, Frank Laske, Ulrich Pohlmann +1 more | 2019-11-12 |
| 10474040 | Systems and methods for device-correlated overlay metrology | Frank Laske, Ulrich Pohlmann, Nadav Gutman | 2019-11-12 |
| 10185800 | Apparatus and method for the measurement of pattern placement and size of pattern and computer program therefor | Frank Laske | 2019-01-22 |
| 9704238 | Method for correcting position measurements for optical errors and method for determining mask writer errors | Oliver Ache, Frank Laske | 2017-07-11 |
| 9201312 | Method for correcting position measurements for optical errors and method for determining mask writer errors | Oliver Ache, Frank Laske | 2015-12-01 |