Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12055859 | Overlay mark design for electron beam overlay | Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-08-06 |
| 11862524 | Overlay mark design for electron beam overlay | Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2024-01-02 |
| 11809090 | Composite overlay metrology target | Anna Golotsvan, Mark Ghinovker, Rawi Dirawi | 2023-11-07 |
| 11720031 | Overlay design for electron beam and scatterometry overlay measurements | Stefan Eyring, Mark Ghinovker, Yoel Feler, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-08-08 |
| 11703767 | Overlay mark design for electron beam overlay | Stefan Eyring, Mark Ghinovker, Yoel Feier, Eitan Hajaj, Ulrich Pohlmann +4 more | 2023-07-18 |
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Stefan Eyring, Ulrich Pohlmann, Nadav Gutman | 2021-12-28 |