| 12222199 |
Systems and methods for measurement of misregistration and amelioration thereof |
Roie Volkovich, Nachshon Rothman, Yossi Simon, Vladimir Levinski, Nireekshan K. Reddy +3 more |
2025-02-11 |
| 12013634 |
Reduction or elimination of pattern placement error in metrology measurements |
Yoel Feler, Vladimir Levinski, Roel Gronheid, Sharon Aharon, Evgeni Gurevich +1 more |
2024-06-18 |
| 12001148 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more |
2024-06-04 |
| 11862521 |
Multiple-tool parameter set calibration and misregistration measurement system and method |
Roie Volkovich |
2024-01-02 |
| 11809090 |
Composite overlay metrology target |
Inna Steely-Tarshish, Mark Ghinovker, Rawi Dirawi |
2023-11-07 |
| 11761969 |
System and method for analyzing a sample with a dynamic recipe based on iterative experimentation and feedback |
Renan Milo, Roie Volkovich, Tal Yaziv, Nir BenDavid |
2023-09-19 |
| 11726410 |
Multi-resolution overlay metrology targets |
Eitan Hajaj, Amnon Manassen, Shlomo Eisenbach, Yoav Grauer, Eugene Maslovsky |
2023-08-15 |
| 11615974 |
Fab management with dynamic sampling plans, optimized wafer measurement paths and optimized wafer transport, using quantum computing |
Amnon Manassen, Tzahi Grunzweig, Einat Peled |
2023-03-28 |
| 11592755 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more |
2023-02-28 |
| 11551980 |
Dynamic amelioration of misregistration measurement |
Roie Volkovich, Eyal Abend |
2023-01-10 |
| 11537043 |
Reduction or elimination of pattern placement error in metrology measurements |
Yoel Feler, Vladimir Levinski, Roel Gronheid, Sharon Aharon, Evgeni Gurevich +1 more |
2022-12-27 |
| 11353493 |
Data-driven misregistration parameter configuration and measurement system and method |
Shlomit Katz, Roie Volkovich, Raviv Yohanan |
2022-06-07 |
| 11353799 |
System and method for error reduction for metrology measurements |
Roie Volkovich, Liran Yerushalmi, Rawi Dirawi, Chen Dror, Nir BenDavid +3 more |
2022-06-07 |