Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978679 | Substrate with cut semiconductor pieces having measurement test structures for semiconductor metrology | — | 2024-05-07 |
| 11353799 | System and method for error reduction for metrology measurements | Roie Volkovich, Liran Yerushalmi, Anna Golotsvan, Rawi Dirawi, Nir BenDavid +3 more | 2022-06-07 |
| 10387608 | Metrology target identification, design and verification | Michael Adel, Tal Shusterman, Ellis Chang | 2019-08-20 |
| 9910953 | Metrology target identification, design and verification | Michael Adel, Tal Shusterman, Ellis Chang | 2018-03-06 |