Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327741 | Oscillating secondary stage for frame-mode overlay metrology | Izhar Agam, Andrew V. Hill, Yoram Uziel, Amnon Manassen | 2025-06-10 |
| 12253805 | Scatterometry overlay metrology with orthogonal fine-pitch segmentation | Vladimir Levinski, Amnon Manassen | 2025-03-18 |
| 12222199 | Systems and methods for measurement of misregistration and amelioration thereof | Roie Volkovich, Nachshon Rothman, Yossi Simon, Anna Golotsvan, Vladimir Levinski +3 more | 2025-02-11 |
| 12170215 | Systems and methods for correction of impact of wafer tilt on misregistration measurements | Vladimir Levinski, Amnon Manassen | 2024-12-17 |
| 12165930 | Adaptive modeling misregistration measurement system and method | Amnon Manassen, Vladimir Levinski, Nireekshan K. Reddy | 2024-12-10 |
| 12131959 | Systems and methods for improved metrology for semiconductor device wafers | Liran Yerushalmi, Ohad Bachar, Yossi Simon, Amnon Manassen, Nir Ben David +2 more | 2024-10-29 |
| 12105431 | Annular apodizer for small target overlay measurement | Itay Gdor, Yuval Lubashevsky, Alon Alexander Volfman, Yevgeniy Men, Elad Farchi | 2024-10-01 |
| 12105414 | Targets for diffraction-based overlay error metrology | Itay Gdor, Yuval Lubashevsky, Eitan Hajaj, Vladimir Levinski | 2024-10-01 |
| 12080610 | Wavelet system and method for ameliorating misregistration and asymmetry of semiconductor devices | Lilach Saltoun | 2024-09-03 |
| 12032300 | Imaging overlay with mutually coherent oblique illumination | Andrew V. Hill, Vladimir Levinski, Amnon Manassen, Yonatan Vaknin | 2024-07-09 |
| 12001148 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Vladimir Levinski +9 more | 2024-06-04 |
| 11880141 | Method of measuring misregistration in the manufacture of topographic semiconductor device wafers | Amnon Manassen, Gilad Laredo | 2024-01-23 |
| 11879632 | System and method for generating light | Carmel Rotschild, Michal Shimanovich, Matej Kurtulik | 2024-01-23 |
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Andrew V. Hill, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2023-12-26 |
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Yuval Lubashevsky, Itay Gdor, Eitan Hajaj | 2023-10-24 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Vladimir Levinski +9 more | 2023-02-28 |
| 11573497 | System and method for measuring misregistration of semiconductor device wafers utilizing induced topography | Amnon Manassen, Gilad Laredo | 2023-02-07 |
| 11281112 | Method of measuring misregistration in the manufacture of topographic semiconductor device wafers | Amnon Manassen, Gilad Laredo | 2022-03-22 |
| 10976562 | Nano-structured non-polarizing beamsplitter | Dmitry Gorelik, Andrew V. Hill, Ohad Bachar, Amnon Manassen | 2021-04-13 |
| 10579768 | Process compatibility improvement by fill factor modulation | Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Sharon Aharon, Michael Adel +5 more | 2020-03-03 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Andrew V. Hill, Ohad Bachar, Vladimir Levinski, Yuri Paskover | 2019-10-15 |
| 10190979 | Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures | Amnon Manassen, Yuri Paskover, Barry Loevsky | 2019-01-29 |
| 9921050 | Spectral control system | Amnon Manassen, Andrew V. Hill, Ohad Bachar, Avi Abramov | 2018-03-20 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Ohad Bachar, Boris Golovanevsky, Barak Bringoltz, Daniel Kandel +8 more | 2017-02-28 |
| 9341769 | Spectral control system | Amnon Manassen, Andrew V. Hill, Ohad Bachar, Avi Abramov | 2016-05-17 |