Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422363 | Scanning scatterometry overlay metrology | Amnon Manassen, Andrew V. Hill, Yuri Paskover, Yonatan Vaknin, Yuval Lubashevsky | 2025-09-23 |
| 12373936 | System and method for overlay metrology using a phase mask | Iftach Galon, Yuval Lubashevsky, Yaniv Weiss, Nireekshan K. Reddy | 2025-07-29 |
| 12105431 | Annular apodizer for small target overlay measurement | Yuval Lubashevsky, Alon Alexander Volfman, Daria Negri, Yevgeniy Men, Elad Farchi | 2024-10-01 |
| 12105414 | Targets for diffraction-based overlay error metrology | Yuval Lubashevsky, Daria Negri, Eitan Hajaj, Vladimir Levinski | 2024-10-01 |
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Yuval Lubashevsky, Daria Negri, Eitan Hajaj | 2023-10-24 |
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Yuval Lubashevsky, Yuri Paskover, Yoram Uziel, Nadav Gutman | 2022-08-09 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Yuri Paskover, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman, Yoram Uziel | 2022-07-05 |