Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422363 | Scanning scatterometry overlay metrology | Amnon Manassen, Andrew V. Hill, Yuri Paskover, Itay Gdor, Yonatan Vaknin | 2025-09-23 |
| 12373936 | System and method for overlay metrology using a phase mask | Iftach Galon, Itay Gdor, Yaniv Weiss, Nireekshan K. Reddy | 2025-07-29 |
| 12105414 | Targets for diffraction-based overlay error metrology | Itay Gdor, Daria Negri, Eitan Hajaj, Vladimir Levinski | 2024-10-01 |
| 12105431 | Annular apodizer for small target overlay measurement | Itay Gdor, Alon Alexander Volfman, Daria Negri, Yevgeniy Men, Elad Farchi | 2024-10-01 |
| 11796925 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Itay Gdor, Daria Negri, Eitan Hajaj | 2023-10-24 |
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Itay Gdor, Yuri Paskover, Yoram Uziel, Nadav Gutman | 2022-08-09 |
| 11112704 | Mitigation of inaccuracies related to grating asymmetries in scatterometry measurements | Ido Adam, Vladimir Levinski, Amnon Manassen | 2021-09-07 |
| 10824079 | Diffraction based overlay scatterometry | Yuri Paskover, Vladimir Levinski, Amnon Manassen | 2020-11-03 |
| 10579768 | Process compatibility improvement by fill factor modulation | Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Sharon Aharon, Michael Adel +5 more | 2020-03-03 |
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Amnon Manassen, Yuri Paskover | 2019-09-03 |
| 10197389 | Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields | Vladimir Levinski, Yuri Paskover, Amnon Manassen | 2019-02-05 |
| 10048132 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Amnon Manassen, Yuri Paskover | 2018-08-14 |