Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422363 | Scanning scatterometry overlay metrology | Amnon Manassen, Andrew V. Hill, Itay Gdor, Yonatan Vaknin, Yuval Lubashevsky | 2025-09-23 |
| 12222199 | Systems and methods for measurement of misregistration and amelioration thereof | Roie Volkovich, Nachshon Rothman, Yossi Simon, Anna Golotsvan, Vladimir Levinski +3 more | 2025-02-11 |
| 12001148 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2024-06-04 |
| 11874539 | Perception camera with road surface glare reduction | Tzvi Philipp, Andrew W. Averhart, Tomer Pe'er | 2024-01-16 |
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Vladimir Levinski | 2023-12-26 |
| 11841621 | Moiré scatterometry overlay | Andrew V. Hill, Vladimir Levinski, Amnon Manassen | 2023-12-12 |
| 11815347 | Optical near-field metrology | Amnon Manassen, Vladimir Levinski | 2023-11-14 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Itay Gdor, Yuval Lubashevsky, Yoram Uziel, Nadav Gutman | 2022-08-09 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Itay Gdor, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman, Yoram Uziel | 2022-07-05 |
| 11314173 | Topographic phase control for overlay measurement | Vladimir Levinski, Amnon Manassen, Yoni Shalibo | 2022-04-26 |
| 11281111 | Off-axis illumination overlay measurement using two-diffracted orders imaging | Yoni Shalibo, Vladimir Levinski, Amnon Manassen, Shlomo Eisenbach, Gilad Laredo +1 more | 2022-03-22 |
| 11119417 | Single cell grey scatterometry overlay targets and their measurement using varying illumination parameter(s) | Amnon Manassen, Eran Amit | 2021-09-14 |
| 11101153 | Parameter-stable misregistration measurement amelioration in semiconductor devices | Vladimir Levinski, Sharon Aharon, Amnon Manassen | 2021-08-24 |
| 10866090 | Estimating amplitude and phase asymmetry in imaging technology for achieving high accuracy in overlay metrology | Tal Marciano, Nadav Gutman, Guy M. Cohen, Vladimir Levinski | 2020-12-15 |
| 10824079 | Diffraction based overlay scatterometry | Yuval Lubashevsky, Vladimir Levinski, Amnon Manassen | 2020-11-03 |
| 10677588 | Localized telecentricity and focus optimization for overlay metrology | Andrew V. Hill, Ohad Bachar, Avi Abramov, Dor Perry | 2020-06-09 |
| 10579768 | Process compatibility improvement by fill factor modulation | Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Sharon Aharon, Michael Adel +5 more | 2020-03-03 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Tzahi Grunzweig, Nadav Gutman, David Gready, Mark Ghinovker, Vladimir Levinski +2 more | 2020-02-18 |
| 10520832 | Topographic phase control for overlay measurement | Vladimir Levinski, Amnon Manassen, Yoni Shalibo | 2019-12-31 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Vladimir Levinski | 2019-10-15 |
| 10408602 | Quality estimation and improvement of imaging metrology targets | Boris Efraty | 2019-09-10 |
| 10401228 | Simultaneous capturing of overlay signals from multiple targets | Andrew V. Hill, Amnon Manassen, Yuval Lubashevsky | 2019-09-03 |
| 10197389 | Approaches in first order scatterometry overlay based on introduction of auxiliary electromagnetic fields | Vladimir Levinski, Yuval Lubashevsky, Amnon Manassen | 2019-02-05 |
| 10190979 | Metrology imaging targets having reflection-symmetric pairs of reflection-asymmetric structures | Amnon Manassen, Barry Loevsky, Daria Negri | 2019-01-29 |