Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11360397 | System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurements | Gil Drachuck, Tom Leviant | 2022-06-14 |
| 11112369 | Hybrid overlay target design for imaging-based overlay and scatterometry-based overlay | — | 2021-09-07 |
| 10817999 | Image-based overlay metrology and monitoring using through-focus imaging | Nimrod Shuall, Claire E. Staniunas | 2020-10-27 |
| 10726169 | Target and process sensitivity analysis to requirements | Michael Adel, Nuriel Amir, Mark Ghinovker, Tal Shusterman, Sergey Borodyansky | 2020-07-28 |
| 10565697 | Utilizing overlay misregistration error estimations in imaging overlay metrology | Tzahi Grunzweig, Nadav Gutman, Mark Ghinovker, Vladimir Levinski, Claire E. Staniunas +2 more | 2020-02-18 |