| 12510831 |
Robust and accurate overlay target design for CMP |
Yoel Feler, Mark Ghinovker |
2025-12-30 |
|
| 12504697 |
Single grab pupil landscape via broadband illumination |
Yaniv Weiss, Yuval Lubashevsky, Itay Gdor, Alon Alexander Volfman |
2025-12-23 |
|
| 12487533 |
Amplitude asymmetry measurements in overlay metrology |
Andrew V. Hill |
2025-12-02 |
|
| 12487190 |
System and method for isolation of specific fourier pupil frequency in overlay metrology |
Yuri Paskover, Itay Gdor, Yuval Lubashevsky, Alexander Volfman, Yoram Uziel +1 more |
2025-12-02 |
|
| 12411420 |
Small in-die target design for overlay measurement |
— |
2025-09-09 |
|
| 12253805 |
Scatterometry overlay metrology with orthogonal fine-pitch segmentation |
Daria Negri, Amnon Manassen |
2025-03-18 |
|
| 12235588 |
Scanning overlay metrology with high signal to noise ratio |
Amnon Manassen, Andrew V. Hill |
2025-02-25 |
|
| 12222199 |
Systems and methods for measurement of misregistration and amelioration thereof |
Roie Volkovich, Nachshon Rothman, Yossi Simon, Anna Golotsvan, Nireekshan K. Reddy +3 more |
2025-02-11 |
|
| 12170215 |
Systems and methods for correction of impact of wafer tilt on misregistration measurements |
Daria Negri, Amnon Manassen |
2024-12-17 |
$744,482,000 |
| 12165930 |
Adaptive modeling misregistration measurement system and method |
Amnon Manassen, Daria Negri, Nireekshan K. Reddy |
2024-12-10 |
$188,249,000 |
| 12140859 |
Overlay target design for improved target placement accuracy |
— |
2024-11-12 |
$371,570,000 |
| 12111580 |
Optical metrology utilizing short-wave infrared wavelengths |
Amnon Manassen, Isaac Salib, Raviv Yohanan, Diana Shaphirov, Eitan Hajaj +7 more |
2024-10-08 |
$836,244,000 |
| 12105433 |
Imaging overlay targets using moiré elements and rotational symmetry arrangements |
Yoel Feler, Mark Ghinovker, Diana Shaphirov, Evgeni Gurevich |
2024-10-01 |
$207,169,000 |
| 12105414 |
Targets for diffraction-based overlay error metrology |
Itay Gdor, Yuval Lubashevsky, Daria Negri, Eitan Hajaj |
2024-10-01 |
$207,169,000 |
| 12078601 |
Universal metrology model |
Nireekshan K. Reddy, Amnon Manassen |
2024-09-03 |
$240,256,000 |
| 12067745 |
Image pre-processing for overlay metrology using decomposition techniques |
Nireekshan K. Reddy |
2024-08-20 |
$198,935,000 |
| 12032300 |
Imaging overlay with mutually coherent oblique illumination |
Andrew V. Hill, Daria Negri, Amnon Manassen, Yonatan Vaknin |
2024-07-09 |
$366,127,000 |
| 12013634 |
Reduction or elimination of pattern placement error in metrology measurements |
Yoel Feler, Roel Gronheid, Sharon Aharon, Evgeni Gurevich, Anna Golotsvan +1 more |
2024-06-18 |
|
| 12001148 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more |
2024-06-04 |
$682,528,000 |
| 11967535 |
On-product overlay targets |
Amnon Manassen, Ido Dolev, Yoram Uziel |
2024-04-23 |
$90,253,000 |
| 11852590 |
Systems and methods for metrology with layer-specific illumination spectra |
Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Yuri Paskover |
2023-12-26 |
$525,500,000 |
| 11841621 |
Moiré scatterometry overlay |
Andrew V. Hill, Amnon Manassen, Yuri Paskover |
2023-12-12 |
$263,066,000 |
| 11815347 |
Optical near-field metrology |
Yuri Paskover, Amnon Manassen |
2023-11-14 |
|
| 11709433 |
Device-like metrology targets |
Amnon Manassen, Eran Amit, Nuriel Amir, Liran Yerushalmi, Amit Shaked |
2023-07-25 |
|
| 11614692 |
Self-Moire grating design for use in metrology |
Yoel Feler |
2023-03-28 |
$65,110,000 |
