Issued Patents All Time
Showing 1–25 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411420 | Small in-die target design for overlay measurement | — | 2025-09-09 |
| 12253805 | Scatterometry overlay metrology with orthogonal fine-pitch segmentation | Daria Negri, Amnon Manassen | 2025-03-18 |
| 12235588 | Scanning overlay metrology with high signal to noise ratio | Amnon Manassen, Andrew V. Hill | 2025-02-25 |
| 12222199 | Systems and methods for measurement of misregistration and amelioration thereof | Roie Volkovich, Nachshon Rothman, Yossi Simon, Anna Golotsvan, Nireekshan K. Reddy +3 more | 2025-02-11 |
| 12170215 | Systems and methods for correction of impact of wafer tilt on misregistration measurements | Daria Negri, Amnon Manassen | 2024-12-17 |
| 12165930 | Adaptive modeling misregistration measurement system and method | Amnon Manassen, Daria Negri, Nireekshan K. Reddy | 2024-12-10 |
| 12140859 | Overlay target design for improved target placement accuracy | — | 2024-11-12 |
| 12111580 | Optical metrology utilizing short-wave infrared wavelengths | Amnon Manassen, Isaac Salib, Raviv Yohanan, Diana Shaphirov, Eitan Hajaj +7 more | 2024-10-08 |
| 12105433 | Imaging overlay targets using moiré elements and rotational symmetry arrangements | Yoel Feler, Mark Ghinovker, Diana Shaphirov, Evgeni Gurevich | 2024-10-01 |
| 12105414 | Targets for diffraction-based overlay error metrology | Itay Gdor, Yuval Lubashevsky, Daria Negri, Eitan Hajaj | 2024-10-01 |
| 12078601 | Universal metrology model | Nireekshan K. Reddy, Amnon Manassen | 2024-09-03 |
| 12067745 | Image pre-processing for overlay metrology using decomposition techniques | Nireekshan K. Reddy | 2024-08-20 |
| 12032300 | Imaging overlay with mutually coherent oblique illumination | Andrew V. Hill, Daria Negri, Amnon Manassen, Yonatan Vaknin | 2024-07-09 |
| 12013634 | Reduction or elimination of pattern placement error in metrology measurements | Yoel Feler, Roel Gronheid, Sharon Aharon, Evgeni Gurevich, Anna Golotsvan +1 more | 2024-06-18 |
| 12001148 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2024-06-04 |
| 11967535 | On-product overlay targets | Amnon Manassen, Ido Dolev, Yoram Uziel | 2024-04-23 |
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Ohad Bachar, Yuri Paskover | 2023-12-26 |
| 11841621 | Moiré scatterometry overlay | Andrew V. Hill, Amnon Manassen, Yuri Paskover | 2023-12-12 |
| 11815347 | Optical near-field metrology | Yuri Paskover, Amnon Manassen | 2023-11-14 |
| 11709433 | Device-like metrology targets | Amnon Manassen, Eran Amit, Nuriel Amir, Liran Yerushalmi, Amit Shaked | 2023-07-25 |
| 11614692 | Self-Moire grating design for use in metrology | Yoel Feler | 2023-03-28 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |
| 11537043 | Reduction or elimination of pattern placement error in metrology measurements | Yoel Feler, Roel Gronheid, Sharon Aharon, Evgeni Gurevich, Anna Golotsvan +1 more | 2022-12-27 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Yuri Paskover, Itay Gdor, Yuval Lubashevksy, Alexander Volfman, Yoram Uziel | 2022-07-05 |
| 11372340 | Method and system for providing a quality metric for improved process control | Daniel Kandel, Guy M. Cohen, Dana Klein, Noam Sapiens, Alex Shulman +3 more | 2022-06-28 |