Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11967535 | On-product overlay targets | Amnon Manassen, Vladimir Levinski, Yoram Uziel | 2024-04-23 |
| 11713959 | Overlay metrology using spectroscopic phase | Andrei V. Shchegrov, Yoram Uziel, Amnon Manassen | 2023-08-01 |
| 11226566 | Method of measuring misregistration of semiconductor devices | Roie Volkovich | 2022-01-18 |
| 11029253 | Computerized method for configuring an inspection system, computer program product and an inspection system | Amir Shoham, Yariv Simovitch | 2021-06-08 |
| 10928739 | Method of measuring misregistration of semiconductor devices | Roie Volkovich | 2021-02-23 |
| 10481101 | Asymmetrical magnification inspection system and illumination module | Haim Feldman, Boris Golberg | 2019-11-19 |
| 9846128 | Inspection system and a method for evaluating an exit pupil of an inspection system | Harel Ilan, Ido Kofler | 2017-12-19 |
| 9535014 | Systems and methods for inspecting an object | Haim Feldman, Ido Almog | 2017-01-03 |
| 9354212 | Inspection having a segmented pupil | Yoav Berlatzky, Amir Shoham | 2016-05-31 |
| 8724882 | Mapping variations of a surface | Doron Meshulach | 2014-05-13 |
| 8228601 | Scanning microscopy using inhomogeneous polarization | Doron Meshulach, Kobi Kan, Haim Feldman, Ori Sarfaty | 2012-07-24 |