Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9846128 | Inspection system and a method for evaluating an exit pupil of an inspection system | Harel Ilan, Ido Dolev | 2017-12-19 |
| 9664907 | Optical element for spatial beam shaping | Yoav Berlatzky, Seffi Sadeh, Haim Eder, Michael Rudman, Hagay Famini | 2017-05-30 |
| 8614790 | Optical system and method for inspection of patterned samples | Yoav Berlatzky, Doron Meshulach, Kobi Barkan | 2013-12-24 |