Issued Patents All Time
Showing 25 most recent of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379669 | Massive overlay metrology sampling with multiple measurement columns | Jonathan M. Madsen, Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon +1 more | 2025-08-05 |
| 12370581 | In-situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Shai Mark, Adi Pahima | 2025-07-29 |
| 12327741 | Oscillating secondary stage for frame-mode overlay metrology | Izhar Agam, Andrew V. Hill, Amnon Manassen, Daria Negri | 2025-06-10 |
| 12131959 | Systems and methods for improved metrology for semiconductor device wafers | Liran Yerushalmi, Daria Negri, Ohad Bachar, Yossi Simon, Amnon Manassen +2 more | 2024-10-29 |
| 12001148 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2024-06-04 |
| 11967535 | On-product overlay targets | Amnon Manassen, Vladimir Levinski, Ido Dolev | 2024-04-23 |
| 11933717 | Sensitive optical metrology in scanning and static modes | Andrew V. Hill, Amnon Manassen, Yossi Simon, Gilad Laredo | 2024-03-19 |
| 11899375 | Massive overlay metrology sampling with multiple measurement columns | Jonathan M. Madsen, Andrei V. Shchegrov, Amnon Manassen, Andrew V. Hill, Yossi Simon +1 more | 2024-02-13 |
| 11713959 | Overlay metrology using spectroscopic phase | Andrei V. Shchegrov, Ido Dolev, Amnon Manassen | 2023-08-01 |
| 11644419 | Measurement of properties of patterned photoresist | Roie Volkovich, Liran Yerushalmi, Amnon Manassen | 2023-05-09 |
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Giampietro Bieli, Shai Mark, Adi Pahima | 2023-05-02 |
| 11637030 | Multi-stage, multi-zone substrate positioning systems | Ulrich Pohlmann, Frank Laske, Nadav Gutman, Ariel Hildesheim, Aviv Balan | 2023-04-25 |
| 11607716 | Systems and methods for chuck cleaning | Shai Mark, Mor Azaria, Giampietro Bieli, Adi Pahima | 2023-03-21 |
| 11592755 | Enhancing performance of overlay metrology | Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more | 2023-02-28 |
| 11409205 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Itay Gdor, Yuval Lubashevsky, Yuri Paskover, Nadav Gutman | 2022-08-09 |
| 11378394 | On-the-fly scatterometry overlay metrology target | Yuri Paskover, Itay Gdor, Yuval Lubashevksy, Vladimir Levinski, Alexander Volfman | 2022-07-05 |
| 11294164 | Integrated system and method | Igor Krivts (Krayvitz), Albert Mariasin, Nir Merry, Rami Elichai, Zvi Goren | 2022-04-05 |
| 11189451 | Charged particle beam source and a method for assembling a charged particle beam source | Itay Asulin, Ofer Yuli, Lavy Shavit, Guy Eytan, Natan Schlimoff +3 more | 2021-11-30 |
| 11177048 | Method and system for evaluating objects | Igor Krivts (Krayvitz), Efim Vinnitsky, Benzion Sender, Ron Naftali | 2021-11-16 |
| 10886092 | Charged particle beam source and a method for assembling a charged particle beam source | Itay Asulin, Ofer Yuli, Lavy Shavit, Guy Eytan, Natan Schlimoff +3 more | 2021-01-05 |
| 10446434 | Chuck for supporting a wafer | Doron Korngut, Yuri Belenky, Ron Naftali, Ron Bar-Or, Yuval Gronau | 2019-10-15 |
| 10177048 | System for inspecting and reviewing a sample | Juergen Frosien, Jacob Levin, Igor Krivts (Krayvitz), Boris Golberg | 2019-01-08 |
| 10068748 | Scanning an object using multiple mechanical stages | Benzion Sender, Doron Aspir, Yohanan Madmon, Ron Naftali, Yuri Belenky | 2018-09-04 |
| 10060736 | Near-field sensor height control | Amir Sagiv, Haim Feldman, Ron Naftali | 2018-08-28 |
| 10056274 | System and method for forming a sealed chamber | Michael R. Rice, Paul B. Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff +3 more | 2018-08-21 |