| 11294164 |
Integrated system and method |
Yoram Uziel, Albert Mariasin, Nir Merry, Rami Elichai, Zvi Goren |
2022-04-05 |
| 11189451 |
Charged particle beam source and a method for assembling a charged particle beam source |
Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan +3 more |
2021-11-30 |
| 11177048 |
Method and system for evaluating objects |
Efim Vinnitsky, Yoram Uziel, Benzion Sender, Ron Naftali |
2021-11-16 |
| 11049704 |
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber |
Irit Ruach-Nir, Michal Eilon, Guy Eytan, Magen Yaacov Schulman, Sven Ruhle +1 more |
2021-06-29 |
| 10886092 |
Charged particle beam source and a method for assembling a charged particle beam source |
Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan +3 more |
2021-01-05 |
| 10177048 |
System for inspecting and reviewing a sample |
Juergen Frosien, Jacob Levin, Yoram Uziel, Boris Golberg |
2019-01-08 |
| 10056274 |
System and method for forming a sealed chamber |
Michael R. Rice, Paul B. Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff +3 more |
2018-08-21 |
| 10049904 |
Method and system for moving a substrate |
Ofer Adan, Israel Avneri, Yoram Uziel, Niranjan Ramchandra Khasgiwale |
2018-08-14 |
| 9997328 |
System and method for forming a sealed chamber |
Michael R. Rice, Ron Naftali, Natan Schlimoff, Israel Avneri, Yoram Uziel +3 more |
2018-06-12 |
| 9829809 |
System and method for attaching a mask to a mask holder |
Israel Avneri, Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman |
2017-11-28 |
| 9587749 |
Slit valve with a pressurized gas bearing |
Michael R. Rice, Natan Schlimoff, Israel Avneri, Yoram Uziel, Erez Admoni +2 more |
2017-03-07 |
| 8772737 |
Conductive element for electrically coupling an EUVL mask to a supporting chuck |
Israel Avneri, Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman, Itzak Yair +1 more |
2014-07-08 |
| 7428850 |
Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system |
Ron Naftali, Yoram Uziel, Ran Vered, Eitan Pinhasi |
2008-09-30 |
| 7317606 |
Particle trap for electrostatic chuck |
Igor Petrov, Eitan Kidron, Guy Eitan, Igal Ben-Dayan |
2008-01-08 |
| 7112803 |
Beam directing system and method for use in a charged particle beam column |
Igor Petrov, Albert Karabekov |
2006-09-26 |
