| 11177048 |
Method and system for evaluating objects |
Igor Krivts (Krayvitz), Efim Vinnitsky, Yoram Uziel, Ron Naftali |
2021-11-16 |
| 11047677 |
X-ray based metrology of a high aspect ratio hole |
— |
2021-06-29 |
| 10068748 |
Scanning an object using multiple mechanical stages |
Yoram Uziel, Doron Aspir, Yohanan Madmon, Ron Naftali, Yuri Belenky |
2018-09-04 |
| 9847209 |
Inspection of regions of interest using an electron beam system |
Alon Litman |
2017-12-19 |
| 9666412 |
Method for charging and imaging an object |
Alon Litman, Yoram Uziel |
2017-05-30 |
| 9490101 |
System and method for scanning an object |
Yuval Gronau, Ishai Schwarzband, Dror Shemesh, Ran Schleyen, Ofir Greenberg |
2016-11-08 |
| 9466462 |
Inspection of regions of interest using an electron beam system |
Alon Litman |
2016-10-11 |
| 8207499 |
Variable rate scanning in an electron microscope |
Amir Shoham, Alon Litman |
2012-06-26 |
| 7535001 |
Method and system for focusing a charged particle beam |
— |
2009-05-19 |
| 7375326 |
Method and system for focusing a charged particle beam |
— |
2008-05-20 |
| 7285779 |
Methods of scanning an object that includes multiple regions of interest using an array of scanning beams |
Alon Litman |
2007-10-23 |
| 7235794 |
System and method for inspecting charged particle responsive resist |
Ophir Dror, Guy Eytan |
2007-06-26 |
