| 12480898 |
Z-profiling of wafers based on X-ray measurements |
Doron Girmonsky, Michal Eilon, Uri Hadar |
2025-11-25 |
|
| 11961221 |
Defect examination on a semiconductor specimen |
Miriam Brook |
2024-04-16 |
$82,852,000 |
| 11543368 |
X-ray based evaluation of a status of a structure of a substrate |
— |
2023-01-03 |
$39,123,000 |
| 11423529 |
Determination of defect location for examination of a specimen |
Doron Girmonsky, Rafael Ben Ami, Boaz Cohen |
2022-08-23 |
$37,610,000 |
| 11022565 |
Process monitoring |
Eugene T. Bullock, Adi Boehm, Gurjeet Singh |
2021-06-01 |
$74,932,000 |
| 10928336 |
X-ray based evaluation of a status of a structure of a substrate |
— |
2021-02-23 |
$34,793,000 |
| 10922809 |
Method for detecting voids and an inspection system |
Vadim Kuchik, Nicolas L. Breil |
2021-02-16 |
$36,444,000 |
| 10347462 |
Imaging of crystalline defects |
Uri Lev, Benjamin Colombeau, Amir Wachs, Kourosh Nafisi |
2019-07-09 |
$20,979,000 |
| 9899185 |
Resolving ambiguities in an energy spectrum |
Mor Baram |
2018-02-20 |
$63,276,000 |
| 9805909 |
Method for detecting voids in interconnects and an inspection system |
Lei Zhong |
2017-10-31 |
$27,276,000 |
| 9490101 |
System and method for scanning an object |
Yuval Gronau, Ishai Schwarzband, Benzion Sender, Ran Schleyen, Ofir Greenberg |
2016-11-08 |
$17,585,000 |
| 8723144 |
Apparatus for sample formation and microanalysis in a vacuum chamber |
Eitan Kidron |
2014-05-13 |
$10,757,000 |
| 8709269 |
Method and system for imaging a cross section of a specimen |
— |
2014-04-29 |
$12,261,000 |
| 8361814 |
Method for monitoring chamber cleanliness |
Michal Eilon, Hen Doozli, Ekaterina Rechav, Eitan Binyamini |
2013-01-29 |
$6,154,000 |
| 7912657 |
Method and system for providing a compensated auger spectrum |
Yuri Shirman |
2011-03-22 |
$5,133,000 |
| 7847267 |
Scanning electron microscope having multiple detectors and a method for multiple detector based imaging |
Pavel Adamec |
2010-12-07 |
$3,240,000 |
| 7842930 |
Charged particle detector assembly, charged particle beam apparatus and method for generating an image |
Gilad Almogy, Pavel Adamec |
2010-11-30 |
|
| 7838830 |
Charged particle beam apparatus and method for operating a charged particle beam apparatus |
Juergen Frosien, Helmut Banzhof, Jacob Levin |
2010-11-23 |
|
| 7683317 |
Method and system for detecting hidden defects |
— |
2010-03-23 |
$9,727,000 |
| 7659506 |
Method and system for generating and reviewing a thin sample |
Michal Avinun-Kalish, Jacob Levin |
2010-02-09 |
$11,111,000 |
| 7473911 |
Specimen current mapper |
Alexander Kadyshevitch, Yaniv Brami, Dmitry Shur |
2009-01-06 |
$22,624,000 |
| 7365320 |
Methods and systems for process monitoring using x-ray emission |
— |
2008-04-29 |
$20,360,000 |
| 7312446 |
Methods and systems for process monitoring using x-ray emission |
— |
2007-12-25 |
|
| 7297965 |
Method and apparatus for sample formation and microanalysis in a vacuum chamber |
Eitan Kidron |
2007-11-20 |
$22,843,000 |
| 7271396 |
Method and device for aligning a charged particle beam column |
— |
2007-09-18 |
$29,272,000 |
