Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11961221 | Defect examination on a semiconductor specimen | Miriam Brook | 2024-04-16 |
| 11543368 | X-ray based evaluation of a status of a structure of a substrate | — | 2023-01-03 |
| 11423529 | Determination of defect location for examination of a specimen | Doron Girmonsky, Rafael Ben Ami, Boaz Cohen | 2022-08-23 |
| 11022565 | Process monitoring | Eugene T. Bullock, Adi Boehm, Gurjeet Singh | 2021-06-01 |
| 10928336 | X-ray based evaluation of a status of a structure of a substrate | — | 2021-02-23 |
| 10922809 | Method for detecting voids and an inspection system | Vadim Kuchik, Nicolas L. Breil | 2021-02-16 |
| 10347462 | Imaging of crystalline defects | Uri Lev, Benjamin Colombeau, Amir Wachs, Kourosh Nafisi | 2019-07-09 |
| 9899185 | Resolving ambiguities in an energy spectrum | Mor Baram | 2018-02-20 |
| 9805909 | Method for detecting voids in interconnects and an inspection system | Lei Zhong | 2017-10-31 |
| 9490101 | System and method for scanning an object | Yuval Gronau, Ishai Schwarzband, Benzion Sender, Ran Schleyen, Ofir Greenberg | 2016-11-08 |
| 8723144 | Apparatus for sample formation and microanalysis in a vacuum chamber | Eitan Kidron | 2014-05-13 |
| 8709269 | Method and system for imaging a cross section of a specimen | — | 2014-04-29 |
| 8361814 | Method for monitoring chamber cleanliness | Michal Eilon, Hen Doozli, Ekaterina Rechav, Eitan Binyamini | 2013-01-29 |
| 7912657 | Method and system for providing a compensated auger spectrum | Yuri Shirman | 2011-03-22 |
| 7847267 | Scanning electron microscope having multiple detectors and a method for multiple detector based imaging | Pavel Adamec | 2010-12-07 |
| 7842930 | Charged particle detector assembly, charged particle beam apparatus and method for generating an image | Gilad Almogy, Pavel Adamec | 2010-11-30 |
| 7838830 | Charged particle beam apparatus and method for operating a charged particle beam apparatus | Juergen Frosien, Helmut Banzhof, Jacob Levin | 2010-11-23 |
| 7683317 | Method and system for detecting hidden defects | — | 2010-03-23 |
| 7659506 | Method and system for generating and reviewing a thin sample | Michal Avinun-Kalish, Jacob Levin | 2010-02-09 |
| 7473911 | Specimen current mapper | Alexander Kadyshevitch, Yaniv Brami, Dmitry Shur | 2009-01-06 |
| 7365320 | Methods and systems for process monitoring using x-ray emission | — | 2008-04-29 |
| 7312446 | Methods and systems for process monitoring using x-ray emission | — | 2007-12-25 |
| 7297965 | Method and apparatus for sample formation and microanalysis in a vacuum chamber | Eitan Kidron | 2007-11-20 |
| 7271396 | Method and device for aligning a charged particle beam column | — | 2007-09-18 |
| 7233008 | Multiple electrode lens arrangement and a method for inspecting an object | Igor Petrov | 2007-06-19 |