Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for sample formation and microanalysis in a vacuum chamber

Method and apparatus for sample formation and microanalysis in a vacuum chamber

US Patent 7297965 · Granted Nov 20, 2007

Estimated economic value: $22,843,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Z-profiling of wafers based on X-ray measurements2025
Defect examination on a semiconductor specimen2024
X-ray based evaluation of a status of a structure of a substrate2023
Determination of defect location for examination of a specimen2022
Process monitoring2021
X-ray based evaluation of a status of a structure of a substrate2021
Method for detecting voids and an inspection system2021
Imaging of crystalline defects2019
Resolving ambiguities in an energy spectrum2018
Method for detecting voids in interconnects and an inspection system2017
System and method for scanning an object2016
Stage structure for operation in vacuum2014