| 11501951 |
X-ray imaging in cross-section using un-cut lamella with background material |
Yehuda Zur |
2022-11-15 |
$47,599,000 |
| 11366072 |
Detecting backscattered electrons in a multibeam charged particle column |
Jacob Levin |
2022-06-21 |
$42,836,000 |
| 11315754 |
Adaptive geometry for optimal focused ion beam etching |
Ilya Blayvas, Gal Bruner, Yehuda Zur, Alexander Mairov, Ron Davidescu +1 more |
2022-04-26 |
$43,127,000 |
| 11264202 |
Generating three dimensional information regarding structural elements of a specimen |
Konstantin Chirko, Itamar Shani, Albert Karabekov, Guy Eytan, Lior Yaron |
2022-03-01 |
$41,046,000 |
| 10903044 |
Filling empty structures with deposition under high-energy SEM for uniform DE layering |
Konstantin Chirko, Yehuda Zur |
2021-01-26 |
$35,448,000 |
| 10714305 |
Retractable detector |
Efim Vinnitsky |
2020-07-14 |
$28,056,000 |
| 10541104 |
System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection |
Uri Lev, Zvi Nir, Arnon Mizrahy |
2020-01-21 |
$34,637,000 |
| 10211026 |
Retractable detector |
Efim Vinnitsky |
2019-02-19 |
$29,015,000 |
| 10156785 |
Inspection of a lithographic mask that is protected by a pellicle |
Nir Ben-David Dodzin, Albert Karabekov, Alex Goldenshtein |
2018-12-18 |
$31,665,000 |
| 10074513 |
Multi mode systems with retractable detectors |
Efim Vinnitsky, Ofir Arzouan, Igor Petrov |
2018-09-11 |
$27,448,000 |
| 9958501 |
System for electrical measurements of objects in a vacuumed environment |
Amir Wachs, Efim Vinnitsky |
2018-05-01 |
|
| 9847209 |
Inspection of regions of interest using an electron beam system |
Benzion Sender |
2017-12-19 |
$29,820,000 |
| 9818577 |
Multi mode system with a dispersion X-ray detector |
Efim Vinnitsky |
2017-11-14 |
$27,960,000 |
| 9666412 |
Method for charging and imaging an object |
Yoram Uziel, Benzion Sender |
2017-05-30 |
$21,030,000 |
| 9632044 |
Imaging bottom of high aspect ratio holes |
Konstantin Chirko |
2017-04-25 |
$22,808,000 |
| 9470751 |
Detecting open and short of conductors |
Amir Shoham |
2016-10-18 |
$11,711,000 |
| 9466462 |
Inspection of regions of interest using an electron beam system |
Benzion Sender |
2016-10-11 |
$23,860,000 |
| 9448253 |
Determining a state of a high aspect ratio hole using measurement results from an electrostatic measurement device |
Konstantin Chirko |
2016-09-20 |
$12,933,000 |
| 9366954 |
Inspection of a lithographic mask that is protected by a pellicle |
Nir Ben-David Dodzin, Albert Karabekov, Alex Goldenshtein |
2016-06-14 |
$14,652,000 |
| 9297692 |
System and method for inspecting a sample using landing lens |
Yoram Uziel, Ofer Adan, Ron Naftali, Juergen Frosien |
2016-03-29 |
$6,414,000 |
| 8389962 |
System and method for compensating for magnetic noise |
Konstantine Chirko, Yoav Nachum |
2013-03-05 |
$7,679,000 |
| 8207499 |
Variable rate scanning in an electron microscope |
Amir Shoham, Benzion Sender |
2012-06-26 |
$5,750,000 |
| 7842935 |
Raster frame beam system for electron beam lithography |
Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Yonatan Lehman +2 more |
2010-11-30 |
$5,930,000 |
| 7521700 |
Raster frame beam system for electron beam lithography |
Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Yonatan Lehman +2 more |
2009-04-21 |
$9,285,000 |
| 7468506 |
Spot grid array scanning system |
Steven R. Rogers, Nissim Elmaliach, Emanuel Elyasef, Ron Naftali |
2008-12-23 |
$29,995,000 |
