Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7468507 | Optical spot grid array scanning system | Steven R. Rogers, Nissim Elmaliach, Emanuel Elyasef, Ron Naftali, Doron Meshulach | 2008-12-23 |
| 7430104 | Electrostatic chuck for wafer metrology and inspection equipment | Igor Krivts | 2008-09-30 |
| 7285779 | Methods of scanning an object that includes multiple regions of interest using an array of scanning beams | Benzion Sender | 2007-10-23 |
| 7098468 | Raster frame beam system for electron beam lithography | Meir Aloni, Mula Friedman, Jimmy Vishnipolsky, Gilad Almogy, Yonatah Lehman +2 more | 2006-08-29 |
| 6914443 | Apparatus and method for enhanced voltage contrast analysis | Chris Talbot | 2005-07-05 |
| 5644132 | System for high resolution imaging and measurement of topographic and material features on a specimen | Alexander Goldenstein, Steven R. Rogers | 1997-07-01 |
| 5466940 | Electron detector with high backscattered electron acceptance for particle beam apparatus | Alexander Goldenstein, Steven R. Rogers | 1995-11-14 |