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Generating three dimensional information regarding structural elements of a specimen |
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2022-03-01 |
| 10716197 |
System, computer program product, and method for dissipation of an electrical charge |
Guy Eytan, Emil Weisz, Samuel Ives Nackash |
2020-07-14 |
| 10156785 |
Inspection of a lithographic mask that is protected by a pellicle |
Alon Litman, Nir Ben-David Dodzin, Alex Goldenshtein |
2018-12-18 |
| 9366954 |
Inspection of a lithographic mask that is protected by a pellicle |
Alon Litman, Nir Ben-David Dodzin, Alex Goldenshtein |
2016-06-14 |
| 7525091 |
Charged particle beam system and a method for inspecting a sample |
Igor Petrov, Guy Eitan |
2009-04-28 |
| 7112803 |
Beam directing system and method for use in a charged particle beam column |
Igor Petrov, Igor Krivts (Krayvitz) |
2006-09-26 |
