| 10545020 |
System, a method and a computer program product for size estimation |
Moshe Amzaleg |
2020-01-28 |
| 10290092 |
System, a method and a computer program product for fitting based defect detection |
Moshe Amzaleg |
2019-05-14 |
| 10156785 |
Inspection of a lithographic mask that is protected by a pellicle |
Alon Litman, Albert Karabekov, Alex Goldenshtein |
2018-12-18 |
| 9829809 |
System and method for attaching a mask to a mask holder |
Israel Avneri, Igor Krivts (Krayvitz), Yoram Uziel, Ido Holcman |
2017-11-28 |
| 9366954 |
Inspection of a lithographic mask that is protected by a pellicle |
Alon Litman, Albert Karabekov, Alex Goldenshtein |
2016-06-14 |
| 9355443 |
System, a method and a computer program product for CAD-based registration |
Zvi Goren |
2016-05-31 |
| 9235885 |
System, a method and a computer program product for patch-based defect detection |
Moshe Amzaleg, Vered Gatt, Yair Hanani, Efrat Rozenman |
2016-01-12 |
| 9070014 |
System, method and computer program product for defect detection based on multiple references |
Moshe Amzaleg, Yehuda Cohen, Efrat Rozenman |
2015-06-30 |
| 9070180 |
Method, system, and computer program product for detection of defects based on multiple references |
Moshe Amzaleg, Yehuda Cohen, Efrat Rozenman |
2015-06-30 |
| 8855399 |
System, a method and a computer program product for CAD-based registration |
Zvi Goren |
2014-10-07 |
| 8772737 |
Conductive element for electrically coupling an EUVL mask to a supporting chuck |
Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Ido Holcman, Itzak Yair +1 more |
2014-07-08 |
| 8498470 |
Method and system for evaluating an object |
Vered Gatt |
2013-07-30 |
| 8249331 |
Method and system for evaluating an object |
Vered Gatt |
2012-08-21 |