| 11953316 |
Geometry based three dimensional reconstruction of a semiconductor specimen by solving an optimization problem, using at least two SEM images acquired at different illumination angles |
Rafael BISTRITZER, Anna Levant, Moshe Eliasof, Michael Chemama |
2024-04-09 |
| 11921063 |
Lateral recess measurement in a semiconductor specimen |
Michael Chemama, Ron Meiry, Moshe Eliasof, Lior Yaron, Guy Eytan +1 more |
2024-03-05 |
| 11264202 |
Generating three dimensional information regarding structural elements of a specimen |
Itamar Shani, Albert Karabekov, Guy Eytan, Lior Yaron, Alon Litman |
2022-03-01 |
| 10903044 |
Filling empty structures with deposition under high-energy SEM for uniform DE layering |
Alon Litman, Yehuda Zur |
2021-01-26 |
| 10714306 |
Measuring a height profile of a hole formed in non-conductive region |
Orit Hava Armon Hershkovich |
2020-07-14 |
| 9632044 |
Imaging bottom of high aspect ratio holes |
Alon Litman |
2017-04-25 |
| 9448253 |
Determining a state of a high aspect ratio hole using measurement results from an electrostatic measurement device |
Alon Litman |
2016-09-20 |
| 8804299 |
Electrostatic chuck and a method for supporting a wafer |
Guy Eytan, Shmuel Shmulik Nakash |
2014-08-12 |
