Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for charging and imaging an object

Method for charging and imaging an object

US Patent 9666412 · Granted May 30, 2017

Estimated economic value: $21,030,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

System and method for isolation of specific fourier pupil frequency in overlay m2025
Massive overlay metrology sampling with multiple measurement columns2025
In-situ process chamber chuck cleaning by cleaning substrate2025
Oscillating secondary stage for frame-mode overlay metrology2025
Systems and methods for improved metrology for semiconductor device wafers2024
Enhancing performance of overlay metrology2024
On-product overlay targets2024
Sensitive optical metrology in scanning and static modes2024
Massive overlay metrology sampling with multiple measurement columns2024
Overlay metrology using spectroscopic phase2023
Measurement of properties of patterned photoresist2023
In situ process chamber chuck cleaning by cleaning substrate2023