Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12370581 | In-situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Shai Mark, Adi Pahima, Yoram Uziel | 2025-07-29 |
| 11638938 | In situ process chamber chuck cleaning by cleaning substrate | Mor Azaria, Shai Mark, Adi Pahima, Yoram Uziel | 2023-05-02 |
| 11607716 | Systems and methods for chuck cleaning | Shai Mark, Mor Azaria, Yoram Uziel, Adi Pahima | 2023-03-21 |
| 11056366 | Sample transport device with integrated metrology | Robert Tas, Kevin O'Brien, Shankar Krishnan, Joshua Butler | 2021-07-06 |