Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Device-like metrology targets

Device-like metrology targets

US Patent 11709433 · Granted Jul 25, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Robust and accurate overlay target design for CMP2025
Single grab pupil landscape via broadband illumination2025
System and method for isolation of specific fourier pupil frequency in overlay m2025
Amplitude asymmetry measurements in overlay metrology2025
Scanning scatterometry overlay metrology2025
Small in-die target design for overlay measurement2025
Grating-over-grating overlay measurement with parallel color per layer2025
Inter-step feedforward process control in the manufacture of semiconductor devic2025
Massive overlay metrology sampling with multiple measurement columns2025
3D profilometry with a Linnik interferometer2025
Method for measuring and correcting misregistration between layers in a semicond2025
Oscillating secondary stage for frame-mode overlay metrology2025