| 12013634 |
Reduction or elimination of pattern placement error in metrology measurements |
Yoel Feler, Vladimir Levinski, Roel Gronheid, Evgeni Gurevich, Anna Golotsvan +1 more |
2024-06-18 |
| 11537043 |
Reduction or elimination of pattern placement error in metrology measurements |
Yoel Feler, Vladimir Levinski, Roel Gronheid, Evgeni Gurevich, Anna Golotsvan +1 more |
2022-12-27 |
| 11101153 |
Parameter-stable misregistration measurement amelioration in semiconductor devices |
Vladimir Levinski, Yuri Paskover, Amnon Manassen |
2021-08-24 |
| 10901325 |
Determining the impacts of stochastic behavior on overlay metrology data |
Evgeni Gurevich, Michael Adel, Roel Gronheid, Yoel Feler, Vladimir Levinski +1 more |
2021-01-26 |
| 10579768 |
Process compatibility improvement by fill factor modulation |
Vladimir Levinski, Eitan Hajaj, Tal Itzkovich, Michael Adel, Yuri Paskover +5 more |
2020-03-03 |