| 12111580 |
Optical metrology utilizing short-wave infrared wavelengths |
Amnon Manassen, Isaac Salib, Raviv Yohanan, Diana Shaphirov, Eitan Hajaj +7 more |
2024-10-08 |
| 12001148 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more |
2024-06-04 |
| 11662562 |
Broadband illumination tuning |
Andrew V. Hill, Amit Shaked, Valery Garmider |
2023-05-30 |
| 11592755 |
Enhancing performance of overlay metrology |
Amnon Manassen, Andrew V. Hill, Yonatan Vaknin, Yossi Simon, Daria Negri +9 more |
2023-02-28 |
| 11300524 |
Pupil-plane beam scanning for metrology |
Andrew V. Hill, Amnon Manassen, Asaf Granot, Andrei V. Shchegrov |
2022-04-12 |
| 11187838 |
Spectral filter for high-power fiber illumination sources |
Andrew V. Hill, Ohad Bachar, Amnon Manassen |
2021-11-30 |
| 11156846 |
High-brightness illumination source for optical metrology |
Amnon Manassen, Andrew V. Hill, Ohad Bachar |
2021-10-26 |
| 10677588 |
Localized telecentricity and focus optimization for overlay metrology |
Andrew V. Hill, Ohad Bachar, Yuri Paskover, Dor Perry |
2020-06-09 |
| 10203247 |
Systems for providing illumination in optical metrology |
Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more |
2019-02-12 |
| 9921050 |
Spectral control system |
Amnon Manassen, Andrew V. Hill, Ohad Bachar, Daria Negri |
2018-03-20 |
| 9719940 |
Compressive sensing with illumination patterning |
Amnon Manassen, Andrew V. Hill |
2017-08-01 |
| 9512985 |
Systems for providing illumination in optical metrology |
Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more |
2016-12-06 |
| 9341769 |
Spectral control system |
Amnon Manassen, Andrew V. Hill, Ohad Bachar, Daria Negri |
2016-05-17 |