AS

Anatoly Shchemelinin

KL Kla-Tencor: 43 patents #12 of 1,394Top 1%
KL Kla: 5 patents #71 of 758Top 10%
📍 Bozeman, MT: #9 of 740 inventorsTop 2%
🗺 Montana: #22 of 3,198 inventorsTop 1%
Overall (All Time): #58,331 of 4,157,543Top 2%
48
Patents All Time

Issued Patents All Time

Showing 1–25 of 48 patents

Patent #TitleCo-InventorsDate
11778720 High efficiency laser-sustained plasma light source with collection of broadband radiation Matthew Derstine, Ilya Bezel, Eugene Shifrin 2023-10-03
11450521 Laser sustained plasma light source with high pressure flow 2022-09-20
11138722 Differential imaging for single-path optical wafer inspection Ilya Bezel, Eugene Shifrin 2021-10-05
11035727 Spectrometer for vacuum ultraviolet measurements in high-pressure environment Ilya Bezel 2021-06-15
10976025 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2021-04-13
10887974 High efficiency laser-sustained plasma light source Matthew Derstine, Ilya Bezel, Eugene Shifrin 2021-01-05
10714327 System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination Ilya Bezel, Eugene Shifrin, Matthew Derstine 2020-07-14
10568195 System and method for pumping laser sustained plasma with a frequency converted illumination source Ilya Bezel, Matthew Derstine 2020-02-18
10520741 System and method for separation of pump light and collected light in a laser pumped light source Ilya Bezel, Matthew Panzer, Eugene Shifrin 2019-12-31
10381216 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Eugene Shifrin, Matthew Panzer 2019-08-13
10283342 Laser sustained plasma light source with graded absorption features Ilya Bezel, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson +1 more 2019-05-07
10257918 System and method for laser-sustained plasma illumination Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav +2 more 2019-04-09
10244613 System and method for electrodeless plasma ignition in laser-sustained plasma light source Anant Chimmalgi, Rudolf Brunner, Ilya Bezel, Erik Kim, Rajeev Patil 2019-03-26
10217625 Continuous-wave laser-sustained plasma illumination source Ilya Bezel, Eugene Shifrin, Matthew Panzer 2019-02-26
10203247 Systems for providing illumination in optical metrology Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Ilya Bezel +16 more 2019-02-12
10145944 System and method for LADAR-based optic alignment and characterization Wei Zhao, Daniel Scott 2018-12-04
10139283 Non-contact thermal measurements of VUV optics Ilya Bezel, Kenneth P. Gross 2018-11-27
9941655 High power broadband light source Anant Chimmalgi, Rahul Yadav, Ilya Bezel, Matthew Derstine 2018-04-10
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more 2018-03-27
9899205 System and method for inhibiting VUV radiative emission of a laser-sustained plasma source Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg +3 more 2018-02-20
9887076 Method and system for controlling convective flow in a light-sustained plasma Ilya Bezel, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more 2018-02-06
9775226 Method and system for generating a light-sustained plasma in a flanged transmission element Ilya Bezel, Matthew Derstine 2017-09-26
9735534 Sub 200nm laser pumped homonuclear excimer lasers Richard W. Solarz, Ilya Bezel 2017-08-15
9723703 System and method for transverse pumping of laser-sustained plasma Ilya Bezel, Richard W. Solarz, Sebaek Oh, Matthew Derstine 2017-08-01
9721761 Open plasma lamp for forming a light-sustained plasma Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Matthew Derstine, Gildardo Delgado 2017-08-01