Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11778720 | High efficiency laser-sustained plasma light source with collection of broadband radiation | Matthew Derstine, Ilya Bezel, Eugene Shifrin | 2023-10-03 |
| 11450521 | Laser sustained plasma light source with high pressure flow | — | 2022-09-20 |
| 11138722 | Differential imaging for single-path optical wafer inspection | Ilya Bezel, Eugene Shifrin | 2021-10-05 |
| 11035727 | Spectrometer for vacuum ultraviolet measurements in high-pressure environment | Ilya Bezel | 2021-06-15 |
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2021-04-13 |
| 10887974 | High efficiency laser-sustained plasma light source | Matthew Derstine, Ilya Bezel, Eugene Shifrin | 2021-01-05 |
| 10714327 | System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illumination | Ilya Bezel, Eugene Shifrin, Matthew Derstine | 2020-07-14 |
| 10568195 | System and method for pumping laser sustained plasma with a frequency converted illumination source | Ilya Bezel, Matthew Derstine | 2020-02-18 |
| 10520741 | System and method for separation of pump light and collected light in a laser pumped light source | Ilya Bezel, Matthew Panzer, Eugene Shifrin | 2019-12-31 |
| 10381216 | Continuous-wave laser-sustained plasma illumination source | Ilya Bezel, Eugene Shifrin, Matthew Panzer | 2019-08-13 |
| 10283342 | Laser sustained plasma light source with graded absorption features | Ilya Bezel, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson +1 more | 2019-05-07 |
| 10257918 | System and method for laser-sustained plasma illumination | Anant Chimmalgi, Sebaek Oh, Joshua Wittenberg, Lauren Wilson, Rahul Yadav +2 more | 2019-04-09 |
| 10244613 | System and method for electrodeless plasma ignition in laser-sustained plasma light source | Anant Chimmalgi, Rudolf Brunner, Ilya Bezel, Erik Kim, Rajeev Patil | 2019-03-26 |
| 10217625 | Continuous-wave laser-sustained plasma illumination source | Ilya Bezel, Eugene Shifrin, Matthew Panzer | 2019-02-26 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Ilya Bezel +16 more | 2019-02-12 |
| 10145944 | System and method for LADAR-based optic alignment and characterization | Wei Zhao, Daniel Scott | 2018-12-04 |
| 10139283 | Non-contact thermal measurements of VUV optics | Ilya Bezel, Kenneth P. Gross | 2018-11-27 |
| 9941655 | High power broadband light source | Anant Chimmalgi, Rahul Yadav, Ilya Bezel, Matthew Derstine | 2018-04-10 |
| 9927094 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Eugene Shifrin, Matthew Panzer, Matthew Derstine, Jincheng Wang +3 more | 2018-03-27 |
| 9899205 | System and method for inhibiting VUV radiative emission of a laser-sustained plasma source | Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg +3 more | 2018-02-20 |
| 9887076 | Method and system for controlling convective flow in a light-sustained plasma | Ilya Bezel, Matthew Derstine, Kenneth P. Gross, David W. Shortt, Wei Zhao +2 more | 2018-02-06 |
| 9775226 | Method and system for generating a light-sustained plasma in a flanged transmission element | Ilya Bezel, Matthew Derstine | 2017-09-26 |
| 9735534 | Sub 200nm laser pumped homonuclear excimer lasers | Richard W. Solarz, Ilya Bezel | 2017-08-15 |
| 9723703 | System and method for transverse pumping of laser-sustained plasma | Ilya Bezel, Richard W. Solarz, Sebaek Oh, Matthew Derstine | 2017-08-01 |
| 9721761 | Open plasma lamp for forming a light-sustained plasma | Lauren Wilson, Anant Chimmalgi, Ilya Bezel, Matthew Derstine, Gildardo Delgado | 2017-08-01 |