Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976025 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine +3 more | 2021-04-13 |
| 10599055 | Self aligning systems and methods for lithography systems | Tamer Coskun | 2020-03-24 |
| 10244613 | System and method for electrodeless plasma ignition in laser-sustained plasma light source | Anant Chimmalgi, Anatoly Shchemelinin, Ilya Bezel, Erik Kim, Rajeev Patil | 2019-03-26 |
| 9927094 | Plasma cell for providing VUV filtering in a laser-sustained plasma light source | Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine +3 more | 2018-03-27 |
| 9645287 | Flexible optical aperture mechanisms | — | 2017-05-09 |
| 9534848 | Method and apparatus to reduce thermal stress by regulation and control of lamp operating temperatures | Jincheng Wang, Anant Chimmalgi, Rajeev Patil, Erik Kim, Quang Giang +7 more | 2017-01-03 |
| 9523646 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Lisheng Gao, Robert M. Danen, Lu Chen | 2016-12-20 |
| 9347891 | Wafer and reticle inspection systems and methods for selecting illumination pupil configurations | Grace Hsiu-Ling Chen, Lisheng Gao, Robert M. Danen, Lu Chen | 2016-05-24 |
| 9255887 | 2D programmable aperture mechanism | — | 2016-02-09 |
| 9110037 | Diode laser based broad band light sources for wafer inspection tools | Anant Chimmalgi, Younus Vora | 2015-08-18 |
| 8896827 | Diode laser based broad band light sources for wafer inspection tools | Anant Chimmalgi, Younus Vora | 2014-11-25 |
| 8414688 | Recirculation high purity system for protecting optical modules or inspection system during storage, transport and shipping | Gildardo Delgado, Frank Chilese | 2013-04-09 |
| 6341761 | Seated valve | Martin Heusser | 2002-01-29 |
| 6047629 | Hydraulic pump | Georg Neumair, Gerhard Lörner | 2000-04-11 |
| 5970168 | Fourier filtering mechanism for inspecting wafers | Steve Montesanto, Gershon Perelman | 1999-10-19 |
| 5359020 | Hardenable compositions comprising bismaleimides, alkenylphenols and phenol diallyl ethers | Rene Huwyler, Andreas Kramer | 1994-10-25 |
| 5259293 | Hydraulic control device | — | 1993-11-09 |
| 5229485 | Soluable polyimides | Andreas Kramer, Jean-Pierre Wolf | 1993-07-20 |
| 5191826 | Hydraulic control device | — | 1993-03-09 |
| 5183869 | Hardenable compositions | Andreas Kramer, Abdul-Cader Zahir | 1993-02-02 |
| 5063961 | Screw-type valve housing | — | 1991-11-12 |
| 4941321 | Directional control with load-sensing passage controlled by throttling non-return valve having adjustable biasing spring | — | 1990-07-17 |
| 4879945 | Hydraulic control device | Heiner Fichtenbeiner | 1989-11-14 |
| 4863141 | Electromagnetically operable valve | — | 1989-09-05 |
| 4739980 | Hydromechanical tool or workpiece clamping apparatus | — | 1988-04-26 |