Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715622 | Material recovery systems for optical components | Vera (Guorong) Zhuang, John Savee, Evgeniia Butaeva, Gary V. Lopez Lopez, Grace Hsiu-Ling Chen | 2023-08-01 |
| 11543757 | System and method for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systems | Shannon Hill | 2023-01-03 |
| 11495428 | Plasmonic photocathode emitters at ultraviolet and visible wavelengths | Katerina Ioakeimidi, Frances Hill, Gary V. Lopez Lopez, Miguel A. Gonzalez, Alan D. Brodie | 2022-11-08 |
| 11268911 | Boron-based capping layers for EUV optics | Shannon Hill, Zefram Marks | 2022-03-08 |
| 11262664 | System and method for protecting optics from vacuum ultraviolet light | Matthew Derstine, John Savee, Evgeniia Butaeva, Serguei Likhanski | 2022-03-01 |
| 11217416 | Plasmonic photocathode emitters | Sergei Belousov, Andrey Knizhnik, Inna M. Iskandarova, Boris Vasilyevich Potapkin, Katerina Ioakeimidi +3 more | 2022-01-04 |
| 11156926 | Vacuum actuator containment for molecular contaminant and particle mitigation | Zefram Marks, Rudy F. Garcia, Joseph Walsh, Matthew Bernard McLaughlin Hoffman | 2021-10-26 |
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Francis Chilese, Rudy F. Garcia, Mohammed Tahmassebpur, Salam Harb | 2021-03-23 |
| 10840055 | System and method for photocathode illumination inspection | Katerina Ioakeimidi, Frances Hill, Rudy F. Garcia, Mike Romero, Zefram Marks +1 more | 2020-11-17 |
| 10804069 | Photocathode designs and methods of generating an electron beam using a photocathode | Katerina Ioakeimidi, Michael E. Romero, Frances Hill, Rudy F. Garcia | 2020-10-13 |
| 10748737 | Electron beam generation and measurement | Katerina Ioakeimidi, Frances Hill, Michael E. Romero, Rudy F. Garcia | 2020-08-18 |
| 10741354 | Photocathode emitter system that generates multiple electron beams | Katerina Ioakeimidi, Rudy F. Garcia, Zefram Marks, Gary V. Lopez Lopez, Frances Hill +1 more | 2020-08-11 |
| 10714307 | Neutral atom imaging system | Ilya Bezel, Eugene Shifrin, Rudy F. Garcia | 2020-07-14 |
| 10714294 | Metal protective layer for electron emitters with a diffusion barrier | Frances Hill, Rudy F. Garcia, Gary V. Lopez Lopez, Michael E. Romero, Katerina Ioakeimidi +1 more | 2020-07-14 |
| 10714295 | Metal encapsulated photocathode electron emitter | Katerina Ioakeimidi, Frances Hill, Gary V. Lopez Lopez, Rudy F. Garcia | 2020-07-14 |
| 10692692 | System and method for providing a clean environment in an electron-optical system | William G. Schultz, Garry Rose | 2020-06-23 |
| 10607806 | Silicon electron emitter designs | Frances Hill, Rudy F. Garcia, Michael E. Romero, Katerina Ioakeimidi | 2020-03-31 |
| 10535493 | Photocathode designs and methods of generating an electron beam using a photocathode | Katerina Ioakeimidi, Michael E. Romero, Frances Hill, Rudy F. Garcia | 2020-01-14 |
| 10446696 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, David L. Brown, Yung-Ho Alex Chuang, John Fielden | 2019-10-15 |
| 10395884 | Ruthenium encapsulated photocathode electron emitter | Rudy F. Garcia, Katerina Ioakeimidi, Frances Hill, Michael E. Romero | 2019-08-27 |
| 10141155 | Electron beam emitters with ruthenium coating | Edgardo Garcia Berrios, Frances Hill, Rudy F. Garcia | 2018-11-27 |
| 10121914 | Back-illuminated sensor with boron layer | Jehn-Huar Chern, Ali R. Ehsani, David L. Brown, Yung-Ho Alex Chuang, John Fielden | 2018-11-06 |
| 10096478 | System and method for rejuvenating an imaging sensor degraded by exposure to extreme ultraviolet or deep ultraviolet light | Gary Janik | 2018-10-09 |
| 9984846 | High brightness boron-containing electron beam emitters for use in a vacuum environment | William G. Schultz, Frances Hill, Edgardo Garcia Berrios, Rudy F. Garcia | 2018-05-29 |
| 9891356 | Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufacture | Joseph F. Walsh, Frank Barkusky, Eduardo Soto, Sarbjit Singh Grewal, Orlando Threet +1 more | 2018-02-13 |