Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9891356 | Spectral purity filters (SPF), support structures for SPF films and corresponding methods of manufacture | Joseph F. Walsh, Frank Barkusky, Eduardo Soto, Sarbjit Singh Grewal, Gildardo Delgado +1 more | 2018-02-13 |